Semiconductor Device and Method of Fabricating the Same

ABSTRACT

A semiconductor device includes a circuit pattern over a first surface of a substrate, an insulating interlayer covering the circuit pattern, a TSV structure filling a via hole through the insulating interlayer and the substrate, an insulation layer structure on an inner wall of the via hole and on a top surface of the insulating interlayer, a buffer layer on the TSV structure and the insulation layer structure, a conductive structure through the insulation layer structure and a portion of the insulating interlayer to be electrically connected to the circuit pattern, a contact pad onto a bottom of the TSV structure, and a protective layer structure on a second surface the substrate to surround the contact pad.

CROSS-REFERENCE TO RELATED APPLICATION(S)

The present application is a continuation-in-part of an earlier filed copending patent application with Ser. No. 13/287,317, filed on Nov. 2, 2011, for which priority is claimed. This earlier filed copending patent application with Ser. No. 13/287,317 is in its entirety incorporated herewith by reference.

The patent application with Ser. No. 13/287,317 is a continuation of the patent application with Ser. No. 12/913,753 filed on Oct. 27, 2010, for which priority is claimed and which has been issued as U.S. Pat. No. 8,076,234. This earlier filed copending patent application with Ser. No. 12/913,753 is in its entirety incorporated herewith by reference.

The present application also claims priority under 35 USC §119 to Korean Patent Application No. 10-2010-0061184, filed on Jun. 28, 2010, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein in its entirety by reference. A certified copy of Korean Patent Application No. 10-2010-0061184 is contained in the parent patent application with Ser. No. 12/913,753.

TECHNICAL FIELD

The present invention relates generally to semiconductor devices, and more particularly, to a method of fabricating a conductive structure and a via structure in an integrated circuit with minimized deterioration.

BACKGROUND OF THE INVENTION

Conductive structures and vias are commonly used as interconnect structures to form an integrated circuit of a semiconductor device. Vias are used to connect conductive lines formed on multiple levels of interconnect layers.

In addition, through silicon vias (TSVs) are formed through the silicon substrate for coupling multiple integrated circuit chips to form a stacked semiconductor device. Such a stacked semiconductor device is formed to provide an integrated circuit with high capacity and low area.

Conductive structures such as conductive plugs are formed to provide connection to transistors, diodes, and the like for forming an integrated circuit. The via structures and the conductive structures may be formed through a same inter-metal insulation layer. Such via and conductive structures are desired to be formed with minimized deterioration for high integrity of operation of the integrated circuit.

SUMMARY OF THE INVENTION

In an example aspect of the present invention, a semiconductor device includes a circuit pattern, an insulating interlayer, a through silicon via (TSV) structure, an insulation lay er structure, a buffer layer, a conductive structure, a contact pad, and a protective layer structure. The circuit pattern is formed over a first surface of a substrate. The insulating interlayer is formed on the substrate to cover the circuit pattern. The TSV structure fills a via hole formed through the insulating interlayer and the substrate. The insulation layer structure is on an inner wall of the via hole and on a top surface of the insulating interlayer. A top surface of the TSV structure is coplanar with a top surface of the insulation layer structure. The buffer layer is formed on the TSV structure and the insulation layer structure. The conductive structure is formed through the insulation layer structure and at least a portion of the insulating interlayer to be electrically connected to the circuit pattern. The contact pad is formed onto a bottom surface of the TSV structure, and the protective layer structure is formed on a second surface of the substrate to surround the contact pad.

In an example embodiment of the present invention, the first surface of the substrate having the circuit pattern formed thereon is opposite the second surface of the substrate having the protective layer structure formed thereon.

In another example embodiment of the present invention, the protective layer structure includes a first oxide layer, a nitride layer, and a second oxide layer stacked on the second surface of the substrate. The TSV structure and the insulation layer structure protrude from the second surface of the substrate, and the first oxide layer surrounds portions of sidewalls of the TSV structure and the insulation layer structure protruding from the second surface of the substrate.

In a further example embodiment of the present invention, the insulation layer structure includes first and second insulation layers. The first insulation layer is on the inner wall of the via hole, and the second insulation layer is on the first insulation layer and the top surface of the insulating interlayer.

In another example embodiment of the present invention, the first and second insulation layers include substantially the same material.

In a further example embodiment of the present invention, the first and second insulation layers have different thicknesses.

In another example embodiment of the present invention, the TSV structure includes a barrier layer pattern and a conductive fill. The barrier layer pattern is on the insulation layer structure, and the conductive fill is formed in an inner space of the via hole formed by the barrier layer pattern.

In a further example embodiment of the present invention, the conductive structure has a top surface coplanar with the top surface of the TSV structure.

In another example embodiment of the present invention, the protective layer structure includes a first oxide layer, a nitride layer, and a second oxide layer stacked on the second surface of the substrate.

In a further example embodiment of the present invention, the protective layer structure includes a nitride layer and an oxide layer stacked on the second surface of the substrate.

In another example embodiment of the present invention, the contact pad is comprised of copper or nickel.

In a further example embodiment of the present invention, the TSV structure includes a center fill and a conductive fill. The center fill is formed within the via hole, and the conductive fill surrounds at least a portion of the center fill within the via hole. The center fill has a thermal expansion coefficient that is lower than that of the conductive fill.

In another example aspect of the present invention, a semiconductor device includes a circuit pattern, an insulating interlayer, a through silicon via (TSV) structure, an insulation layer structure, a buffer layer, a conductive structure, a contact pad, and a protective layer structure. The circuit pattern is formed over a first surface of a substrate. The insulating interlayer is formed on the substrate to cover the circuit pattern. The TSV structure fills a via hole formed through the insulating interlayer and the substrate. The insulation layer structure is on an inner wall of the via hole and on a top surface of the insulating interlayer. A top surface of the TSV structure is coplanar with a top surface of the insulation layer structure. The buffer layer is formed on the TSV structure and the insulation layer structure. The conductive structure is formed through the insulation layer structure and at least a portion of the insulating interlayer to be electrically connected to the circuit pattern. The contact pad is formed onto a bottom surface of the TSV structure. The protective layer structure is formed on a second surface of the substrate to surround the contact pad and at least a portion of the TSV structure protruding from the second surface of the substrate.

In a further example aspect of the present invention, a stacked semiconductor device includes first and second first integrated circuit chips. The first integrated circuit chip includes a first circuit pattern, an insulating interlayer, a through silicon via (TSV) structure, an insulation layer structure, a buffer layer, a conductive structure, a contact pad, and a protective layer structure. The first circuit pattern is formed over a first surface of a first substrate, and the insulating interlayer is formed on the substrate to cover the first circuit pattern. The TSV structure fills a via hole formed through the insulating interlayer and the first substrate.

The insulation layer structure is on an inner wall of the via hole and on a top surface of the insulating interlayer. A top surface of the TSV structure is coplanar with a top surface of the insulation layer structure. The buffer layer is formed on the TSV structure and the insulation layer structure. The conductive structure is formed through the insulation layer structure and at least a portion of the insulating interlayer to be electrically connected to the circuit pattern. The contact pad is formed onto a bottom surface of the TSV structure, and the protective layer structure is formed on a second surface of the first substrate to surround the contact pad. The second integrated circuit chip includes a second circuit pattern, a wiring, and a contact structure. The second circuit pattern is formed on a second substrate, and the wiring is electrically connected to the second circuit pattern. The contact structure is for electrically connecting the contact pad of the first integrated circuit chip to the wiring of the second integrated circuit chip.

In a further example embodiment of the present invention, the first integrated circuit chip further includes another wiring electrically connected to the conductive structure.

In another example embodiment of the present invention, the first integrated circuit chip further includes a first pad electrode and a solder. The first pad electrode is electrically connected to the wiring of the first integrated circuit chip. The solder is for electrically connecting the first pad electrode to an external printed circuit board (PCB).

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a semiconductor device having a conductive structure and a via structure formed with method steps according to example embodiments of the present invention;

FIGS. 2, 3, 4, 5, 6, 7, 8, 9, and 10 are cross-sectional views illustrating method steps during fabrication of the semiconductor device of FIG. 1, according to example embodiments of the present invention;

FIGS. 11 and 12 are cross-sectional views illustrating additional method steps during fabrication of the semiconductor device of FIG. 1, according to an example embodiment of the present invention;

FIG. 13 is a cross-sectional view illustrating a stacked semiconductor device including the semiconductor device of FIG. 1, according to an example embodiment of the present invention;

FIGS. 14, 15, 16, 17, 18, and 19 are cross-sectional views illustrating method steps during fabrication of the semiconductor device of FIG. 13, according to example embodiments of the present invention;

FIG. 20 is a cross-sectional view of a semiconductor device with a conductive structure and a via structure having a center fill, according to an example embodiment of the present invention;

FIGS. 21 and 22 are cross-sectional views illustrating method steps during fabrication of the semiconductor device of FIG. 20, according to an example embodiment of the present invention;

FIG. 23 is a cross-sectional view illustrating a stacked semiconductor device including the semiconductor device of FIG. 20, according to an example embodiment of the present invention;

FIGS. 24, 25, and 26 show block diagrams of systems, each having a stacked semiconductor device, according to example embodiments of the present invention;

FIGS. 27, 28, 29, and 30 are cross-sectional views illustrating semiconductor devices with a contact pad and various protective layer structures formed under a via structure, according to example embodiments of the present invention;

FIGS. 31 and 32 are cross-sectional views illustrating stacked semiconductor devices with a contact pad and various protective layer structures formed under a via structure, according to example embodiments of the present invention;

FIGS. 33 and 34 are cross-sectional views illustrating semiconductor devices with a contact pad and various protective layer structures formed under a via structure having a center fill, according to example embodiments of the present invention; and

FIG. 35 is a cross-sectional view illustrating a stacked semiconductor device with a contact pad and a protective layer structure formed under a via structure having a center fill, according to an example embodiment of the present invention.

The figures referred to herein are drawn for clarity of illustration and are not necessarily drawn to scale. Elements having the same reference number in FIGS. 1, 2, 3, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, and 35 refer to elements having similar structure and/or function, unless stated other-wise.

DETAILED DESCRIPTION

Various example embodiments are described more fully hereinafter with reference to the accompanying drawings, in which some example embodiments are shown. The present inventive concept may, however, be embodied in many different forms and should not be construed as limited to the example embodiments set forth herein. Rather, these example embodiments are provided so that this description will be thorough and complete, and will fully convey the scope of the present inventive concept to those skilled in the art. In the drawings, the sizes and relative sizes of layers and regions may be exaggerated for clarity.

It will be understood that when an element or layer is referred to as being “on,” “connected to” or “coupled to” another element or layer, it can be directly on, connected or coupled to the other element or layer or intervening elements or layers may be present. In contrast, when an element is referred to as being “directly on,” “directly connected to” or “directly coupled to” another element or layer, there are no intervening elements or layers present. Like numerals refer to like elements throughout. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.

It will be understood that, although the terms first, second, third etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present inventive concept.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.

For example, if the device in the figures is turned over, elements described as “below” or “beneath” other elements or features would then be oriented “above” the other elements or features. Thus, the exemplary term “below” can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present inventive concept. As used herein, the singular forms “a,” “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

Example embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized example embodiments (and intermediate structures). As such, variations from the shapes of the illustrations as a result, for example, of fabrication techniques and/or tolerances, are to be expected. Thus, example embodiments should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from fabrication.

For example, an implanted region illustrated as a rectangle will, typically, have rounded or curved features and/or a gradient of implant concentration at its edges rather than a binary change from implanted to non-implanted region. Likewise, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation takes place. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the present inventive concept.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this inventive concept belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Hereinafter, example embodiments will be explained in detail with reference to the accompanying drawings.

Referring to FIG. 1, a first circuit pattern 12 is formed on a first substrate 10 that is comprised of a semiconductor material such as single crystalline silicon for example. The first circuit pattern 12 includes transistors, diodes, and the like for forming an integrated circuit. A first insulating interlayer 14 is formed on the first substrate 10 to surround the first circuit pattern 12. Conductive structures such as conductive plugs 28 comprised of a conductive material such as polysilicon for example are formed for electrically connecting to the first circuit pattern 12.

A via hole 16 is formed as an opening through the first insulating interlayer 14 and through at least a portion of the first substrate 10. The via hole 16 has a depth of from about 10 μm to about 100 μm and preferably from about 30 μm to about 60 μm, in an example embodiment of the present invention. The via hole 16 has a diameter of from about 1 μm to about 30 μm and preferably from about 1 μm to about 10 μm, in an example embodiment of the present invention. A plurality of via holes 16 may be formed in an example embodiment of the present invention.

An insulation layer structure 18 is formed on an inner wall of the via hole 16 and on the first insulating interlayer 14. The insulation layer structure 18 includes a first insulation layer 18 a and a second insulation layer 18 b. The first insulation layer 18 a is formed on the inner wall of the via hole 16 for electrically insulating the first substrate 10 from a through silicon via (TSV) structure 24 formed within the via hole 16.

The second insulation layer 18 b is formed on the first insulating interlayer 14 and on the top surface of the first insulation layer 18 a. The first insulating interlayer 14 together with the second insulation layer 18 b function as an insulating interlayer structure having a total thickness that is the sum of the thicknesses of the first and second insulating interlayers 14 and 18 b.

The insulation layer structure 18 is comprised of a material having a low dielectric constant such that the parasitic capacitance between the first substrate 10 and the conductive material of the TSV structure 24 is minimized. For example, the insulation layer structure 18 is comprised of silicon oxide or carbon-doped silicon oxide that may be porous, in an example embodiment of the present invention.

The insulation layer structure 18 has a relatively large thickness such that the parasitic capacitance between the first substrate 10 and the TSV structure 24 is minimized. If the first insulation layer 18 a has a thickness that is less than about 1000 Å, the first insulation layer 18 a may not provide sufficient insulation.

If the first insulation layer 18 a has a thickness that is larger than about ¼ of the diameter of the via hole 16, the TSV structure 24 may have an insufficient volume, thereby resulting in increased resistance of the TSV structure 24. Thus, the first insulation layer 18 a is formed with a thickness that is higher than about 1000 Å and that is less than about ¼ of the diameter of the via hole 16. The first and second insulation layers 18 a and 18 b may be formed to have different thicknesses.

A barrier layer pattern 20 a is formed on the first insulation layer 18 a and is exposed in the via hole 16 at a top surface that is coplanar with that of the second insulation layer 18 b. The barrier layer pattern 20 a has a cup shape to surround a conductive fill 22 a. The barrier layer pattern 20 a is comprised of a metal or a metal nitride such as tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt, nickel, nickel boride, tungsten nitride, and the like, alone or in a combination thereof, in an example embodiment of the present invention.

A conductive fill 22 a fills an inner space formed by the barrier layer pattern 20 a within the via hole 16. The conductive fill 22 a is comprised of a metal having a low resistance such as copper or tungsten for example. In an example embodiment of the present invention, the conductive fill 22 a is comprised of copper. The conductive fill 22 a and the barrier layer pattern 20 a form the TSV structure 24. The TSV structure 24 has a top surface of portions of the conductive fill 22 a and the barrier layer pattern that are coplanar with a top surface of the second insulation layer 18 b.

Further referring to FIG. 1, a protective buffer layer 26 is formed on the TSV structure 24 and the second insulation layer 18 b (see FIG. 7) for preventing the conductive material of the TSV structure 24 from diffusing into other elements. The buffer layer 26 is comprised of silicon nitride, silicon carbonitride (SiCN), silicon carbo-oxynitride (SiCON), and the like, alone or in a combination thereof, according to an example embodiment of the present invention. The buffer layer 26 has a thickness of from about 300 Å to about 1000 Å, according to an example embodiment of the present invention.

A contact plug 28 that is an example conductive structure is formed through the second insulation layer 18 b and in the first insulating interlayer 14 for electrically connecting to the first circuit pattern 12. The contact plug 28 has a top surface coplanar with that of the TSV structure 24. The contact plug 28 is comprised of a metal such as tungsten or copper for example. The contact plug 28 may be formed with a barrier layer (not shown) and such a metal.

A first inter-metal dielectric layer 30 is formed on the buffer layer 26. The first inter-metal dielectric layer 30 is comprised of a material having a low dielectric constant such as silicon oxide, carbon-doped silicon oxide, and the like, for example.

A plurality of first wirings 34 are formed through the first inter-metal dielectric layer 30 and the buffer layer 26. Some of the first wirings 34 contact the top surface of the TSV structure 24, and others of the first wirings 34 contact the top surface of the contact plug 28. The first wirings 34 may be formed with a barrier layer (not shown) and a metal such as copper or tungsten for example. In an example embodiment of the present invention, the first wirings 34 are comprised of copper.

A second inter-metal dielectric layer 36 is formed on the first inter-metal dielectric layer 30 and the first wirings 34. A plurality of second wirings 38 are formed through the second inter-metal dielectric layer 36 for being electrically connected to the first wirings 34. A third inter-metal dielectric layer (not shown) and/or third wirings (not shown) may be further formed.

The semiconductor device of FIG. 1 has good insulation characteristics and a low parasitic capacitance between the first substrate 10 and the TSV structure 24. Additionally, the TSV structure 24 has a low resistance and good signal transfer characteristics.

FIGS. 2, 3, 4, 5, 6, 7, 8, 9, and 10 are cross-sectional views illustrating method steps during fabrication of the semiconductor device of FIG. 1, according to an example embodiment of the present invention.

Referring to FIG. 2, the first circuit pattern 12 is formed on the first substrate 10 and includes transistors, diodes, and the like for forming an integrated circuit. The first insulating interlayer 14 is formed on the first substrate 10 to surround the first circuit pattern 12. During subsequent fabrication, the second insulation layer 18 b also serving as an insulating interlayer is further formed (see FIG. 4). Thus, the first insulating interlayer 14 may be formed to have a relatively small thickness.

Referring to FIG. 3, a photo-resist pattern (not shown) having a thickness of from about 2 μm to about 5 μm is formed on the first insulating interlayer 14. The first insulating interlayer 14 and a portion the first substrate 10 are etched using the photo-resist pattern as an etching mask to form the via hole 16 through the first insulating interlayer 14 and in the first substrate 10.

If the via hole 16 is formed to have a depth less than about 10 μm, the TSV structure 24 formed in the via hole 16 may have insufficient volume. If the via hole 16 is formed to have a depth more than about 100 μm, filling the via hole 16 with a conductive material may be difficult. Thus, the via hole 16 is formed to have a depth of from about 10 μm to about 100 μm and preferably from about 30 μm to about 60 μm, in an example embodiment of the present invention.

If the via hole 16 has a diameter less than about 1 μm, filling the via hole 16 with a conductive material may be difficult. If the via hole 16 has a diameter more than about 30 μm, the semiconductor device may not be formed with high integration density. Thus, the via hole 16 is formed to have a diameter of from about 1 μm to about 30 μm, in an example embodiment of the present invention. The present invention may be practiced with formation of a plurality of via holes 16. The photo-resist pattern is removed after patterning of the via holes 16.

Referring to FIG. 4, the insulation layer structure 18 is formed on the inner wall of the via hole 16 and on the first insulating interlayer 14. The first insulation layer 18 a is formed to electrically insulate the first substrate 10 from the conductive material of the TSV structure 24. The second insulation layer 18 b serves as an insulating interlayer.

The insulation layer structure 18 is comprised of a material having a low dielectric constant such as silicon oxide or carbon-doped silicon oxide, in an example embodiment of the present invention. For example, the insulation layer structure 18 may be formed using tetraethyl orthosilicate BOS) or ozone TEOS having good step coverage characteristics. The insulation layer structure 18 may be formed by a plasma oxidation process or a chemical vapor deposition (CVD) process.

The first insulation layer 18 a is formed to have a thickness that is more than about 1000 Å and smaller than about ¼ of the diameter of the via hole 16. The second insulation layer 18 b is formed with a higher thickness than the first insulation layer 18 a. In an example embodiment of the present invention, the first and second insulation layers 18 a and 18 b are formed to have a thickness ratio of from about 0.3:1 to about 0.9:1. When the second insulation layer 18 b is formed to have a relatively large thickness, the first insulating interlayer 14 may be formed to have a relatively small thickness in FIG. 2.

Referring to FIG. 5, a barrier layer 20 is formed on the insulation layer structure 18 and is comprised of a metal or a metal nitride such as tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt, nickel, nickel boride, tungsten nitride, and the like, alone or in a combination thereof, in an example embodiment of the present invention. The barrier layer 20 is formed to have a thickness of from about 100 Å to about 3000 Å, in an example embodiment of the present invention.

A seed layer (not shown) may be formed on the barrier layer 20 to serve as an electrode for forming a conductive layer 22 in a subsequent process. Such a seed layer is comprised of copper deposited by a physical vapor deposition (PVD) process, according to an example embodiment of the present invention.

The conductive layer 22 is formed from the seed layer to fill the remaining portion of the via hole 16. The conductive layer 22 is comprised of a metal having a low resistance and is formed by an electroplating process, an electroless plating process, an electrografting process, a PVD process, and the like, in an example embodiment of the present invention. A heat treatment process may be performed on the conductive layer 22. The conductive layer 22 is comprised of a metal such as copper or tungsten, in an example embodiment of the present invention.

Referring to FIG. 6, upper portions of the conductive layer 22 and the barrier layer 20 are planarized by a chemical mechanical polishing (CMP) process and/or an etch back process until a top surface of the second insulation layer 18 b is exposed. Thus, a conductive layer pattern 22 a and a barrier layer pattern 20 a remain within the via hole 16 to form the TSV structure 24.

In such a planarization process, an upper portion of the second insulation layer 18 b may be removed. However, less than about 70% of the second insulation layer 18 b is removed from such a planarization process, in an example embodiment of the present invention. That is, at least 30% of the original second insulation layer 18 b remains to form a portion of the insulating interlayer.

Additionally during such a planarization process, a portion of the second insulation layer 18 b remains such that the thickness of the removed object layer and the time for performing the planarization process may be reduced. As a result, damage to the elements of the semiconductor device on the first substrate 10 during such a planarization process may be reduced. Furthermore, the contact plug 28 is not yet formed and the first circuit pattern 12 is not exposed for not being damaged during such a planarization process.

Referring to FIG. 7, the protective buffer layer 26 is formed on the second insulation layer 18 b to cover the TSV structure 24. The buffer layer 26 is comprised of an insulating material such as silicon nitride, silicon carbonitride (SiCN), silicon carbo-oxynitride (SiCON), and the like, alone or in a combination thereof, in an example embodiment of the present invention. The protective buffer layer 26 has a thickness of from about 300 Å to about 1000 Å, in an example embodiment of the present invention. The buffer layer 26 prevents the conductive material of the TSV structure 24 from diffusing to other elements.

Referring to FIG. 8, the contact plugs 28 that are example conductive structures are formed through the buffer layer 26, the second insulation layer 18 b, and portions of the first insulating interlayer 14 to be electrically connected to the first circuit pattern 12. Thus, a front-end-of-the-line (FEOL) process may be completed.

In particular, the buffer layer 26, the second insulation layer 18 b, and the first insulating interlayer 14 are patterned to form contact holes therein. A barrier layer (not shown) and a conductive material are formed into such contact holes to form the contact plugs 28. An upper portion of the barrier layer and the conductive material for forming the conductive plugs 28 are planarized by a CMP process and/or an etch back process until a top surface of the buffer layer 26 is exposed. The contact plugs 28 are comprised of copper or tungsten, in an example embodiment of the present invention.

In this manner, the TSV structure 24 is formed in the FEOL process, and the contact plug 28 is formed after the TSV structure 24 is formed. Thus, the contact plug 28 is not damaged during formation of the TSV structure 24. Additionally, the TSV structure 24 is protected by the buffer layer 26 during formation of the contact plug 28 such that the TSV structure 24 is not damaged during the formation of the contact plug 28. As a result, the TSV structure 24 and the contact plug 28 are formed with high integrity to result in good conductivity characteristics.

Referring to FIG. 9, the first inter-metal dielectric layer 30 is formed on the buffer layer 26 and the contact plug 28. The first inter-metal dielectric layer 30 is comprised of silicon oxide or carbon-doped silicon oxide, in an example embodiment of the present invention. The first inter-metal dielectric layer 30 and the buffer layer 26 are patterned to form first openings 32 exposing top surfaces of the TSV structure 24 and the contact plugs 28.

Referring to FIG. 10, a barrier layer (not shown) and a conductive layer are deposited onto the TSV structure 24, the contact plug 28, and the first inter-metal dielectric layer 30 to fill the first openings 32. Such a conductive layer is comprised of copper deposited by an electroplating process, an electroless plating process, an electrografting process, a PVD process, and the like, in an example embodiment of the present invention. Upper portions of the barrier layer and the conductive layer filling the first openings 32 are planarized until a top surface of the first inter-metal dielectric layer 30 is exposed to form first wirings 34 within the first openings 32.

Referring back to FIG. 1, a second inter-metal dielectric layer 36 is formed on the first inter-metal dielectric layer 30 and the first wirings 34. The second inter-metal dielectric layer 36 is patterned to form second openings (not shown), and second wirings 38 are formed in such second openings to be electrically connected to the first wirings 34. A third inter-metal dielectric layer (not shown) and third wirings (not shown) may be further formed.

In this manner, the semiconductor device of FIG. 1 has good insulation characteristics and a low parasitic capacitance between the first substrate 10 and the TSV structure 24. Additionally, the TSV structure 24 is formed to have low resistance and good signal transfer characteristics.

FIGS. 11 and 12 are cross-sectional views illustrating an additional treatment during fabrication of the semiconductor device of FIG. 1, according to an example embodiment of the present invention. Thus, method steps of FIGS. 2, 3, 4, 5, and 6 are performed to form the TSV structure 24 having the conductive fill 22 a and the barrier layer pattern 20 a in FIG. 6.

Subsequently referring to FIG. 11 after FIG. 6, a heat treatment process is performed after the TSV structure 24 is formed in FIG. 6 such that the TSV structure 24 is thermally expanded. Thus, the TSV structure 24 has an initial protrusion portion formed on the top surface to form an expanded conductive fill 22 b to define an expanded TSV structure 24 b.

When the heat treatment process is performed at a temperature of less than about 100° C., the TSV structure 24 may not be sufficiently expanded. When the heat treatment process is performed at a temperature of more than about 600° C., the TSV structure 24 may be deteriorated. Thus, the heat treatment process of FIG. 11 is performed at a temperature of from about 100° C. to about 600° C., according to an example embodiment of the present invention.

Referring to FIG. 12, an upper portion of the expanded TSV structure 24 b is planarized by a CMP process and/or an etch back process to form the TSV structure 24 having a planar top surface with removal of the initial protrusion portion of FIG. 11. In this manner, the TSV structure 24 has already been thermally expanded such that the TSV structure 24 does not thermally expand as much in subsequent processes for forming the buffer layer 26 and the first inter-metal dielectric layer 30. After FIG. 12, the process steps of FIGS. 7, 8, 9, and 10 are performed to complete the semiconductor device.

FIG. 13 is a cross-sectional view illustrating a stacked semiconductor device including the semiconductor device of FIG. 1, according to an example embodiment of the present invention. Referring to FIG. 13, the stacked semiconductor includes a first integrated circuit chip 150, a second integrated circuit chip 152, a solder 48, and a contact structure 112.

For example, the first integrated circuit chip 150 includes a memory device, a logic device, or an imaging device formed therein. The first integrated circuit chip 150 is formed similarly as the semiconductor device of FIG. 1, except that bottom surfaces of a TSV structure 55 and a first insulation layer pattern 18 c are exposed at a bottom surface of a first substrate 10 a. Additionally, a first protection layer 44 is further formed on a third wiring 42 and a third inter-metal dielectric layer 40 with the solder 48 being formed through the first protection layer 44.

The first integrated circuit chip 150 includes the first substrate 10 a, the first circuit pattern 12, the contact plug 28, the first insulating interlayer 14, and an insulation layer structure 19. The first integrated circuit chip 150 also includes a TSV structure 55 formed through the first insulating interlayer 14, the first substrate 10 a, and the insulation layer structure 19.

First, second, and third wirings 34, 38, and 42 and first, second, and third inter-metal dielectric layers 30, 36, and 40 are also formed in the first integrated circuit chip 150. The first protection layer 44 covers the third wiring 42, and the solder 48 contacts the third wiring 42 through the first protection layer 44.

The first substrate 10 a is comprised of single crystalline silicon, according to an example embodiment of the present invention. The first substrate 10 a has a thickness of from about 10 μm to about 100 μm, according to an example embodiment of the present invention. The first substrate 10 a has a bottom surface that is coplanar with that of the TSV structure 55, according to an example embodiment of the present invention. Alternatively, the present invention may also be practiced with the bottom surface of the TSV structure 55 being protruded from that of the first substrate 10 a.

Further in FIG. 13, a via hole 16 is formed through the first substrate 10 a and has a diameter of from about 1 μm to about 30 μm and preferably from about 1 μm to about 10 μm, according to an example embodiment of the present invention. The insulation layer structure 19 is formed on the sidewall of the via hole 16 and on the first insulating interlayer 14. The insulation layer structure 19 includes a first insulation layer pattern 18 c and a second insulation layer pattern 18 b.

The first insulation layer pattern 18 c is formed on the sidewall of the via hole 16 and has a cylindrical shape to surround the TSV structure 55. The second insulation layer pattern 18 b is formed on the first insulating interlayer 14 and on the top surface of the first insulation pattern 18 c. A barrier layer pattern 50 b and a seed layer (not shown) are formed on a sidewall of the first insulation layer pattern 18 c within the via hole 16.

Further referring to FIG. 13, the conductive fill 52 a is formed in the space surrounded by the barrier layer pattern 50 b. The conductive fill 52 a is comprised of a metal having a low resistance such as copper, aluminum, gold, indium, nickel, and the like, according to an example embodiment of the present invention. The first protection layer 44 is formed on the third inter-metal dielectric layer 40 to surround the third wiring 42. The first protection layer 44 is comprised of an insulating material such as polyimide for example. The third wiring 42 may also be referred as a first pad electrode 42.

The solder 48 is formed to be electrically connected to the first pad electrode 42. The solder 48 may contact a printed circuit board (PCB) (not shown). Alternatively, the first pad 42 may be electrically connected to a lead frame (not shown) by wire bonding.

The second integrated circuit chip 152 includes a second substrate 100, a second circuit pattern 102, wirings 104, second insulating inter-layers 106, and a second pad electrode 108. The present invention may be practiced with the second integrated circuit chip 152 including elements similar to those of the first integrated circuit chip 150. Alternatively, the present invention may be practiced with the second integrated circuit chip 152 including elements different from those of the first integrated circuit chip 150.

The second pad electrode 108 is formed on the second insulating inter-layers 106 to be electrically connected to the wirings 104. The second pad electrode 108 is electrically connected to the TSV structure 55 of the first substrate 10 a. A second protection layer 110 is also formed on the second insulating inter-layers 106 to cover the second pad electrode 108. The second protection layer 110 is comprised of polyimide, according to an example embodiment of the present invention.

The contact structure 112 including a conductive material is formed through the second protection layer 110 to contact the second pad electrode 108 and the TSV structure 55 of the first integrated circuit chip 150. The contact structure 112 is comprised of silver solder paste, according to an example embodiment of the present invention.

The stacked semiconductor device of FIG. 13 includes the stacked first and second integrated circuit chips 150 and 152 that are electrically connected to each other by the TSV structure 55. The semiconductor device has a reduced parasitic capacitance between the TSV structure 55 and the first substrate 10 a from the insulation pattern 18 c. The semiconductor device of FIG. 13 may further have other chips (not shown) that are sequentially stacked on each other and that are electrically connected to each other by TSV structures formed therein.

FIGS. 14, 15, 16, 17, 18, and 19 are cross-sectional views illustrating method steps during fabrication of the semiconductor device of FIG. 13, according to an example embodiment of the present invention.

Referring to FIG. 14, the first circuit pattern 12 is formed on the first substrate 10, and the first insulating interlayer 14 is formed on the first substrate 10 to surround the first circuit pattern 12. The first insulating interlayer 14 and the first substrate 10 are patterned to form the via hole 16 through the first insulating interlayer 14 and a portion of the first substrate 10. The insulation layer structure 18 and a preliminary TSV structure 54 including a preliminary harrier layer pattern 50 a and a conductive fill 52 a are formed after formation of such a via hole 16 similarly as in FIG. 6.

Referring to FIG. 15, the protective buffer layer 26 is formed on the first insulating interlayer 14 and the preliminary TSV structure 54. The buffer layer 26 is formed to have a thickness of from about 300 Å to about 1000 Å, according to an example embodiment of the present invention. Thereafter, the contact plug 28 is formed through the buffer layer 26 and the second insulation layer 18 b and into the first insulating interlayer 14 to be electrically connected to the first circuit pattern 12.

Referring to FIG. 16, the first inter-metal dielectric layer 30 is formed on the buffer layer 26. The first wirings 34 are formed through the first inter-metal dielectric layer 30 and the buffer layer 26 to be electrically connected respectively to the preliminary TSV structure 54 and the contact plug 28.

Second and third inter-metal dielectric layers 36 and 40 and second and third wirings 38 and 42 are formed on the first inter-metal dielectric layer 30 and the first wirings 34. In addition, a first protection layer 44 is formed on the third inter-metal dielectric layer 40 to cover the third wiring 42. The first protection layer 46 is comprised of polyimide, according to an example embodiment of the present invention. The first protection layer 46 is patterned to form an opening 46 exposing the third wiring 42.

Referring to FIG. 17, bottom portions of the first substrate 10, the insulation layer structure 18, and the barrier layer pattern 50 a are planarized by grinding to expose a bottom surface of the conductive fill 52 a. Thus, the resulting first substrate 10 a has a thickness that is less than that of the preliminary first substrate 10. The conductive fill 52 a and the barrier layer pattern 50 b remain within the via hole to define the TSV structure 55. Additionally with such grinding, the insulation layer structure 18 is transformed into the insulation layer pattern structure 19 including the first insulation layer pattern 18 c and the second insulation layer pattern 18 b.

The preliminary first substrate 10 is grinded until a bottom surface of the TSV structure 55 is exposed and for forming the insulation layer pattern structure 19, the barrier layer pattern 50 b, and the first substrate 10 a. The present invention may be practiced with the bottom surface of the conductive fill 52 a being coplanar with that of the first substrate 10 a. Alternatively, the present invention may be practiced with the bottom surface of the conductive fill 52 a being protruded from that of the first substrate 10 a.

The first insulation layer pattern 18 c has a cylindrical shape on the sidewall of the via hole 16. The barrier layer pattern 50 b has a cylindrical shape on a sidewall of the first insulation layer pattern 18 c. Referring to FIG. 18, the solder 48 is formed in the opening 46 to complete the first integrated circuit chip 150 with the TSV structure 55 in the first substrate 10 a.

Referring to FIG. 19, the second integrated circuit chip 152 is formed in the second substrate 100. In addition, the second circuit pattern 102, the wirings 104, and the plurality of second insulating inter-layers 106 are formed for the second integrated circuit chip 152. The second pad electrode 108 is formed on the second insulating inter-layers 106 to be electrically connected to the wirings 104. The second pad electrode 108 is formed to be facing the TSV structure 55 of the first substrate 10 a.

Further referring to FIG. 19, the second protection layer 110 is formed on the second insulating inter-layers 106 to cover the second pad electrode 108. The second protection layer 110 is patterned to form an opening (not shown) exposing the second pad electrode 108. The contact structure 112 is formed in such an opening to be electrically connected to the second pad electrode 108.

Referring back to FIG. 13, the bottom surface of the TSV structure 55 of the first substrate 10 a is attached to the contact structure 112 of the second substrate 100. Thus, the stacked semiconductor device including the first and second integrated circuit chips 150 and 152 is completed.

FIG. 20 is a cross-sectional view of a semiconductor device with a conductive structure and a via structure having a center fill, according to an alternative embodiment of the present invention. The semiconductor device of FIG. 20 is similar to that of FIG. 1, except for the TSV structures.

Referring to FIG. 20, the insulation layer structure 18 including the first insulation layer 18 a and the second insulation layer 18 b are formed on an inner wall of the via hole 16 and on the first insulating interlayer 14. The first insulation layer 18 a is formed on the inner wall of the via hole 16 for electrically insulating the first substrate 10 from a TSV structure 66 comprised of a conductive material.

The second insulation layer 18 b is formed on the first insulating interlayer 14 and the first insulation layer 18 a to serve as an insulating interlayer. The insulation layer structure 18 is comprised of a dielectric material having a low dielectric constant so that the parasitic capacitance between the first substrate 10 and the conductive material of the TSV structure 24 is minimized. For example, the insulation layer structure 18 is comprised of silicon oxide or carbon-doped silicon oxide, which may be porous, according to an example embodiment of the present invention.

The insulation layer structure 18 has a relatively high thickness so that the parasitic capacitance between the first substrate 10 and the TSV structure 24 is minimized. For example, the first insulation layer 18 a has a thickness that is greater than about 1000 Å and less than about ¼ of the diameter of the via hole 16.

A barrier layer pattern 60 is formed on the first insulation layer 18 a within the via hole and also has a top surface exposed within the via hole and coplanar with a top surface of the second insulation layer 18 b. The barrier layer pattern 60 is comprised of a metal or a metal nitride such as tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt, nickel, nickel boride, tungsten nitride, and the like, alone or in a combination thereof, according to an example embodiment of the present invention.

A conductive fill 62 is formed on the barrier layer pattern 60 within the via hole 16. The conductive fill 62 has a cup shape to surround a center fill 64 within the via hole 16. The conductive fill 62 is comprised of a metal having a low resistance such as copper, aluminum, gold, indium, nickel, and the like, alone or in a combination thereof, according to an example embodiment of the present invention. The conductive fill 62 is comprised of copper, according to an example embodiment of the present invention.

The center fill 64 is surrounded by the conductive fill 62 within the via hole 16. The center fill 64 is comprised of an insulating material or a conductive material such as spin on glass (SOG), flowable oxide (FOX), titanium, aluminum, a porous material, and the like, according to an example embodiment of the present invention.

In addition, the material of the center fill 64 has a thermal expansion coefficient that is from about three times to about four times lower than a thermal expansion coefficient of the material of the conductive fill 62. For example, the conductive fill 62 comprised of copper has a thermal expansion coefficient of 17 PPM (parts per million)/° C. In that case, the center fill 64 is comprised of a material having a lower thermal expansion coefficient of from about 3 PPM (parts per million)/° C. to about 4 PPM (parts per million)/° C. Thus, the center fill 64 buffers the thermal expansion of the conductive fill 62 during subsequent fabrication steps for forming the semiconductor device of FIG. 20.

The conductive fill 62, the barrier layer pattern 60 and the center fill 64 define the TSV structure 66. The TSV structure 66 has a top surface that is coplanar with that of the second insulation layer 18 b.

The protective buffer layer 26 is formed on the TSV structure 66 and the second insulation layer 18 b. The protective buffer layer 26 is comprised of silicon nitride, silicon carbonitride, silicon carbo-oxynitride, and the like, alone or in a combination thereof, according to an example embodiment of the present invention.

The contact plug 28 is formed through the second insulation layer 18 b and in the first insulating interlayer 14 to be electrically connected to the first circuit pattern 12. The first and second wirings 34 and 38 and the first and second inter-metal dielectric layers 30 and 36 are formed on the second insulation layer 18 b, the buffer layer 26, the TSV structure 66, and the contact plug 28.

The semiconductor device of FIG. 20 has a low parasitic capacitance and good insulation characteristics between the first substrate 10 and the TSV structure 66. Additionally, the TSV structure 66 has a low resistance and good signal transfer characteristics.

FIGS. 21 and 22 are cross-sectional views illustrating method steps during fabrication of the semiconductor device of FIG. 20, according to an example embodiment of the present invention.

The process steps as illustrated in FIGS. 2, 3, and 4 are first performed to form the first insulating interlayer 14 on the first substrate 10, and to form the via hole 16 through the first insulating interlayer 14 and into the first substrate 10. In addition, the insulation layer structure 18 is formed on the inner wall of the via hole 16 and on the first insulating interlayer 14.

Referring to FIG. 21, a barrier layer 61 is formed on the insulation layer structure 18, and a conductive layer 63 is formed on the barrier layer 61. The conductive layer 63 is comprised of a metal having a low resistance such as copper, aluminum, gold, indium, nickel, and the like, alone or in a combination thereof, according to an example embodiment of the present invention. In an example embodiment of the present invention, the conductive layer 63 is comprised of copper.

A center fill layer 65 is formed on the conductive layer 63 and fills the remaining portion of the via hole 16 after formation of the conductive layer 63. The center fill layer 65 is comprised of SOG, FOX, titanium, aluminum, a porous material, and the like, for example. The material of the center fill layer 65 has a thermal expansion coefficient that is from about three times to about four times lower than a thermal expansion coefficient of the material of the conductive layer 63.

For example, the conductive layer 63 comprised of copper has a thermal expansion coefficient of 17 PPM (parts per million)/° C. In that case, the center fill layer 65 is comprised of a material having a lower thermal expansion coefficient of from about 3 PPM (parts per million)/° C. to about 4 PPM (parts per million)/° C. Thus, the center fill layer 65 buffers the thermal expansion of the conductive layer 63 during subsequent fabrication steps.

Referring to FIG. 22, upper portions of the center fill layer 65, the conductive layer 63, and the barrier layer 61 may be removed until a top surface of the second insulation layer 18 b is exposed. Thus, the TSV structure 66 is formed with the conductive fill 62, the barrier layer pattern 60, and the center fill 64 contained within the via hole 16. The process steps of FIGS. 7, 8, 9, and 10 may be further performed to complete the semiconductor device of FIG. 20.

FIG. 23 is a cross-sectional view illustrating a stacked semiconductor device including the semiconductor device of FIG. 20, according to an example embodiment of the present invention. The stacked semiconductor device of FIG. 23 is similar to that of FIG. 13, except the stacked semiconductor device of FIG. 23 includes the semiconductor device of FIG. 20 instead of the semiconductor device 1 that is included in FIG. 13.

Referring to FIG. 23, the stacked semiconductor device includes a first integrated circuit chip 150, a second integrated circuit chip 152, the solder 48, and the contact structure 112. The insulation layer pattern structure 19 is formed on the sidewall of the via hole 16 and on the first insulating interlayer 14. The insulation layer structure 19 may include the first insulation layer pattern 18 c and the second insulation layer pattern 18 b.

The first insulation layer pattern 18 c is formed on the sidewall of the via hole 16 and has a cylindrical shape. The second insulation layer pattern 18 b is formed on the first insulating interlayer 14 and on the first insulation layer pattern 18 c. A barrier layer pattern 60 a and a seed layer pattern (not shown) are formed on a sidewall of the first insulation layer pattern 18 c and have a top surface that is coplanar with that of the second insulation layer pattern 18 b.

Further in FIG. 23, a conductive fill 62 a is formed on the barrier layer pattern 60 a and has a cup shape surrounding the center fill 64. A bottom surface of the conductive fill 62 a is exposed at the bottom surface of the first substrate 10 a. The present invention may be practiced with the bottom surface of the conductive fill 62 a being coplanar with the bottom surface of the first substrate 10 a or being protrude from the bottom surface of the first substrate 10 a.

The center fill 64 is formed in the space surrounded by the conductive fill 62 a within the via hole 16 and has a top surface coplanar with the top surfaces of the conductive fill 62 a, the barrier layer pattern 60 a, and the second insulation layer pattern 18 b. The center fill 64 is comprised of SOG, FOX, titanium, aluminum, a porous material, and the like, in an example embodiment of the present invention.

The stacked semiconductor device of FIG. 23 is fabricated according to the fabrication steps illustrated in FIGS. 21 and 22 to form the semiconductor device of FIG. 20. The wirings 34, 38 and 42 and the protection layer 44 are formed by process steps as illustrated and described with reference to FIG. 16. In addition, the process steps as illustrated and described with reference to FIGS. 17, 18, and 19 are performed to form the stacked semiconductor device of FIG. 23.

FIG. 24 is a block diagram of a system having a stacked semiconductor device such as shown in FIG. 13 or 23, according to an example embodiment of the present invention. Referring to FIG. 24, the system includes a controller 520 and a memory 510. The memory 510 is a DRAM device or a flash memory device being implemented as the stacked semiconductor device such as shown in FIG. 13 or 23 for example. The memory controller 520 provides an input signal for controlling operation of the memory 510.

FIG. 25 is a block diagram illustrating a system having a stacked semiconductor device such as shown in FIG. 13 or 23, according to another example embodiment of the present invention. Referring to FIG. 25, the system includes a host 700 and a memory 510. The memory 510 is a DRAM device or a flash memory device being implemented as the stacked semiconductor device such as shown in FIG. 13 or 23 for example.

The host 700 may be included in a desktop computer, a laptop computer, a camera, a mobile device, a communication device, and the like. The host 700 provides an input signal for controlling and operating the memory 510. The memory 510 may serve as a data storing media.

FIG. 26 is a block diagram of a system 600 having a stacked semiconductor device such as shown in FIG. 13 or 23, according to another example embodiment of the present invention. Referring to FIG. 26, the system 600 may be a portable device that includes a memory 510 implemented as the stacked semiconductor device such as shown in FIG. 13 or 23 for example. Examples of the portable device 600 include an MP3 player, a video player, a portable multi-media player (PMP), etc.

The portable device 600 includes the memory 510, a memory controller 520, an encoder/decoder (EDC) 610, a display element 620, and an interface 670. Data is input to or output from the memory 510 by way of the memory controller 520. As illustrated with the dashed lines of FIG. 26, data may be directly input from the EDC 610 to the memory 510, or data may be directly output from the memory 510 to the EDC 610.

The EDC 610 encodes data to be stored in the memory 510 such as by encoding audio and/or video data stored in the memory 510 of an MP3 player or a PMP player. Further, the EDC 610 may perform MPEG encoding for storing video data in the memory 510. Moreover, the EDC 610 may include multiple encoders to encode different types of data depending on their formats. For example, the EDC 610 may include an MP3 encoder for encoding audio data and an MPEG encoder for encoding video data.

The EDC 610 may also decode data that is output from the memory 510 such as by performing MP3 decoding for audio data from the memory 510. Alternatively, the EDC 610 may perform MPEG decoding of video data from the memory 510. Moreover, the EDC 610 may include multiple decoders to decode different types of data depending on their formats. For example, the EDC 610 may include an MP3 decoder for audio data and an MPEG decoder for video data.

In other embodiments, the EDC 610 may include only a decoder. For example, encoded data may be input to the EDC 610, and then the EDC 610 may decode the input data for transfer in the memory controller 520 or the memory 510.

The EDC 610 may receive data to be encoded or data being encoded by way of the interface 670. The interface 670 complies with established interface standards (e.g., FireWire, USB, etc.) to include a FireWire interface, a USB interface, etc. Thus, data may be output from the memory 510 by way of the interface 670.

The display element 620 displays a representation of user data that is output from the memory 510 and decoded by the EDC 610. Examples of the display element 620 include a speaker outputting an audio representation of the data, a display screen outputting a video representation of the data, etc.

FIGS. 27, 28, 29, and 30 are cross-sectional views illustrating semiconductor devices with a contact pad and various protective layer structures formed under the via structure, according to example embodiments of the present invention. FIGS. 27, 28, 29, and 30 have elements with the same reference number as in FIG. 1 for referring to elements having similar structure and/or function as already described in reference to FIG. 1. However, the semiconductor devices of FIGS. 27, 28, 29, and 30 each further include a contact pad 95 and various protective layer structures.

The semiconductor device in FIG. 27 includes a first protective layer structure 90 formed on a bottom surface of the first substrate 10, according to an example embodiment of the present invention. The semiconductor device in FIG. 27 also includes a contact pad 95 that is formed through the first protective layer structure 90 in contact with a bottom surface of the TSV structure 24.

In this manner in the semiconductor device of FIG. 27, the first circuit pattern 12 is formed on the top surface (i.e., a first surface) of the semiconductor substrate 10. In addition in the semiconductor device of FIG. 27, the first protective layer structure 90 and the contact pad 95 are formed on the bottom surface (i.e., a second surface) of the semiconductor substrate 10 that is opposite of the top surface of the semiconductor substrate 10.

Furthermore, the first protective layer structure 90 in FIG. 27 includes a third insulation layer 70, a fifth insulation layer 80, and a fourth insulation layer 75 that are sequentially formed to be stacked on the bottom surface of the first substrate 10, in an example embodiment of the present invention. The third and fourth insulation layers 70 and 75 are each comprised of an oxide such as silicon oxide for example, and the fifth insulation layer 80 is comprised of a nitride such as silicon nitride for example, according to an example embodiment of the present invention.

Such a fifth insulation layer 80 has good protective characteristics as a covering structure with high hygroscopicity. The fifth insulation layer 80 has higher hygroscopicity than the third and fourth insulation layers 70 and 75, according to an example embodiment of the present invention. The first protective layer structure 90 has a thickness corresponding to that of the contact pad 95 for surrounding the contact pad 95. When the contact pad 95 has a large thickness, the first protective layer structure 90 includes the third and fourth insulation layers 70 and 75 each comprised of an oxide that is easily formed to have a large thickness such that the first protective layer structure 90 contains and surrounds the sidewalls of the contact pad 95.

In the example of FIG. 27, the contact pad 95 contacts a bottom surface of the TSV structure 24, and further contacts a bottom surface of the insulation layer structure 18 and a portion of the bottom surface of the first substrate 10. The contact pad 95 is comprised of a metal such as copper or nickel and the like, according to an example embodiment of the present invention.

Such a contact pad 95 that is electrically connected to the TSV structure 24 also electrically connects to an external chip or wiring structure more easily than the TSV structure 24. Additionally, the first protective layer structure 90 surrounds a sidewall of the contact pad 95 on the bottom of the first substrate 10 such that the contact pad 95 and/or the first substrate 10 may not be damaged.

The semiconductor device of FIG. 27 may be manufactured by processes substantially similar as illustrated with reference to FIGS. 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, and/or 17. That is similarly as shown in FIG. 17, a lower portion of the first substrate 10 is removed such as by grinding/polishing until bottom surfaces of the TSV structure 24 and the insulation layer structure 18 are exposed. Thereafter, the third insulation layer 70, the fifth insulation layer 80, and the fourth insulation layer 75 are sequentially stacked on the exposed bottom surfaces of the TSV structure 24, the insulation layer 18, and the first substrate 10 to form the first protective layer structure 90. Subsequently, an opening is patterned through the first protective layer structure 90 to expose the bottom surfaces of the TSV structure 24 and the insulation layer structure 18. Thereafter, the contact pad 95 is formed to fill such an opening.

The semiconductor device of FIG. 28 is similar to that of FIG. 27 except that FIG. 28 illustrates when the lower portion of the first substrate 10 is excessively removed. In that case, portions of sidewalls of the TSV structure 24 and/or the insulation layer structure 18 are exposed to protrude beyond the bottom surface of the first substrate 10. Further in FIG. 28, the third insulation layer 70 of a second protective layer structure 91 is formed to surround the exposed sidewalls of the TSV structure 24 and/or the insulation layer structure 18 that protrude beyond the bottom surface of the substrate 10.

The semiconductor device of FIG. 29 is similar to that of FIG. 27 except that FIG. 29 illustrates a third protective layer structure 92 that is different from the first protective layer structure 90 of FIG. 27. Referring to FIG. 29, the third protective layer structure 92 includes a fifth insulation layer 80 and a fourth insulation layer 75 that are sequentially stacked on the bottom surface of the first substrate 10. In an example embodiment of the present invention, the fourth insulation layer 75 is comprised of an oxide such as silicon oxide for example, and the fifth insulation layer 80 is comprised of a nitride such as silicon nitride for example.

In the example embodiment of FIG. 29, the fifth insulation layer 80 is formed onto the bottom surface of the substrate 10 to serve as an etch stop layer during patterning of an opening through the protective layer structure 92 for forming the contact pad 95. In addition, the fifth insulation layer 80 comprised of a nitride has good protective characteristics as a covering structure due to its high hygroscopicity. The fifth insulation layer 80 has higher hygroscopicity than the fourth insulation layer 75 according to an example embodiment of the present invention.

That is, the fifth insulation layer 80 and the fourth insulation layer 75 are sequentially formed on the exposed bottom surfaces of the TSV structure 24, the insulation layer structure 18, and the first substrate 10 to form the third protective layer structure 92. Thereafter, the fourth insulation layer 75 is patterned until a portion of the fifth insulation layer 80 is exposed. Subsequently, the exposed portion of the fifth insulation layer 80 is removed until the bottom surface of the TSV structure 24 and the insulation layer structure 18 are exposed to form the opening having the contact pad 95 filled therein.

The semiconductor device of FIG. 30 is similar to that of FIG. 28 with a bottom portion of the TSV structure 24 and/or the insulation layer structure 18 protruding beyond the bottom surface of the first substrate 10. Such a protrusion of the TSV structure 24 and/or the insulation layer structure 18 may result from excessive removal of the lower portion of the first substrate 10.

However in FIG. 30, a fourth protective layer structure 94 is formed to surround such a bottom portion of the TSV structure 24 and/or the insulation layer structure 18 that protrude beyond the bottom surface of the first substrate 10. The fourth protective layer structure 94 is comprised of an oxide such as silicon oxide for example or a nitride such as silicon nitride for example, in an example embodiment of the present invention.

Also in FIG. 30, the contact pad 95 is formed on the bottom surfaces of the TSV structure 24 and the insulation layer structure 18 and on a portion of a bottom surface of the fourth protective layer structure 94. Further in FIG. 30, the protective layer structure 94 surrounds just the portion of the sidewalls of the TSV structure 24 and/or the insulation layer structure 18 that protrude beyond the bottom surface of the substrate 10. Thus in FIG. 30, the protective layer structure 94 does not surround the sidewall of the contact pad 95.

FIGS. 31 and 32 are cross-sectional views illustrating stacked semiconductor devices with a contact pad and various protective layer structures formed under a via structure, according to example embodiments of the present invention. The stacked semiconductor device of FIG. 31 is similar to the stacked semiconductor device of FIG. 13. However, the first integrated circuit chip 150 in FIG. 31 further includes the contact pad 95 and the protective layer structure 90 as already described in reference to the semiconductor device of FIG. 27.

Referring to FIGS. 13 and 31, the stacked semiconductor device includes the first integrated circuit chip 150, the second integrated circuit chip 152, solder 48, and a contact structure 112. The contact pad 95 that is surrounded by the first protective layer structure 90 contacts the contact structure 112 such that the first integrated circuit chip 150 is electrically connected to the second integrated circuit chip 152 via the contact pad 95, according to an example embodiment of the present invention.

In an alternative embodiment of the present invention, another contact member such as a solder ball for example may be formed between the contact pad 95 and the contact structure 112.

In another example embodiment of the present invention, the first integrated circuit chip 150 of the stacked semiconductor device may include the second protective layer structure 91 of FIG. 28. In that case, the first integrate circuit chip 150 would include the third insulation layer 70 of the second protective layer structure 91 to surround the sidewalls of the TSV structure 24 and/or the insulation layer structure 18 that protrude beyond the bottom surface of the substrate 10.

In a further example embodiment of the present invention, FIG. 32 illustrates a stacked semiconductor device with the first integrated circuit chip 150 being similar to the semiconductor device of FIG. 30. Thus, the first integrated circuit chip 150 of FIG. 32 includes the contact pad 95 and the fourth protective layer structure 94 that surrounds just the portion of the TSV structure 24 and/or the insulation layer structure 18 that protrude beyond the bottom surface of the first substrate 10.

In an alternative example embodiment of the present invention, FIG. 33 illustrates a semiconductor device similar to that of FIG. 27. However in FIG. 33, the TSV structure 24 includes a center fill 64 a that is surrounded by the conductive fill 22 a. In addition in FIG. 33, the material of the center fill 64 a has a thermal expansion coefficient that is from about three times to about four times lower than a thermal expansion coefficient of the material of the conductive fill 22 a. For example, the conductive fill 22 a comprised of copper has a thermal expansion coefficient of 17 PPM (parts per million)/° C. In that case, the center fill 64 a is comprised of a material having a lower thermal expansion coefficient of from about 3 PPM (parts per million)/° C. to about 4 PPM (parts per million)/° C. Thus, the center fill 64 a buffers the thermal expansion of the conductive fill 22 a during subsequent fabrication steps.

In another alternative example embodiment of the present invention, FIG. 34 illustrates a semiconductor device similar to that of FIG. 30. However in FIG. 34, the TSV structure 24 includes a center fill 64 a that is surrounded by the conductive fill 22 a. In addition in FIG. 34, the material of the center fill 64 a has a thermal expansion coefficient that is from about three times to about four times lower than a thermal expansion coefficient of the material of the conductive fill 22 a. For example, the conductive fill 22 a comprised of copper has a thermal expansion coefficient of 17 PPM (parts per million)/° C. In that case, the center fill 64 a is comprised of a material having a lower thermal expansion coefficient of from about 3 PPM (parts per million)/° C. to about 4 PPM (parts per million)/° C. Thus, the center fill 64 a buffers the thermal expansion of the conductive fill 22 a during subsequent fabrication steps.

In a further alternative example embodiment of the present invention, FIG. 35 illustrates a stacked semiconductor device similar to that of FIG. 31. However in FIG. 35, the TSV structure 55 includes a center fill 64 a that is surrounded by the conductive fill 52 a. In addition in FIG. 35, the material of the center fill 64 a has a thermal expansion coefficient that is from about three times to about four times lower than a thermal expansion coefficient of the material of the conductive fill 52 a. For example, the conductive fill 52 a comprised of copper has a thermal expansion coefficient of 17 PPM (parts per million)/° C. In that case, the center fill 64 a is comprised of a material having a lower thermal expansion coefficient of from about 3 PPM (parts per million)/° C. to about 4 PPM (parts per million)/° C. Thus, the center fill 64 a buffers the thermal expansion of the conductive fill 52 a during subsequent fabrication steps.

According to example embodiments of the present invention, the semiconductor device has a low parasitic capacitance and good insulation characteristics between the TSV structure and the substrate. In addition, the conductive structure electrically connected to a circuit pattern is formed after formation of the protective buffer layer on the TSV structure to prevent deterioration to the conductive structure and the TSV structure.

The foregoing is illustrative of example embodiments and is not to be construed as limiting thereof. Although a few example embodiments have been described, those skilled in the art will readily appreciate that many modifications are possible in the example embodiments without materially departing from the novel teachings and advantages of the present inventive concept.

Accordingly, all such modifications are intended to be included within the scope of the present inventive concept as defined in the claims. In the claims, means-plus-function clauses are intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures.

Therefore, it is to be understood that the foregoing is illustrative of various example embodiments and is not to be construed as limited to the specific example embodiments disclosed, and that modifications to the disclosed example embodiments, as well as other example embodiments, are intended to be included within the scope of the appended claims.

The present invention is limited only as defined in the following claims and equivalents thereof. 

1. A semiconductor device comprising: a circuit pattern formed over a first surface of a substrate; an insulating interlayer formed on the substrate to cover the circuit pattern; a through silicon via (TSV) structure filling a via hole formed through the insulating interlayer and the substrate; an insulation layer structure on an inner wall of the via hole and on a top surface of the insulating interlayer, wherein a top surface of the TSV structure is coplanar with a top surface of the insulation layer structure; a buffer layer on the TSV structure and the insulation layer structure; a conductive structure formed through the insulation layer structure and at least a portion of the insulating interlayer to be electrically connected to the circuit pattern; a contact pad formed onto a bottom surface of the TSV structure; and a protective layer structure formed on a second surface of the substrate to surround the contact pad.
 2. The semiconductor device of claim 1, wherein the first surface of the substrate having the circuit pattern formed thereon is opposite the second surface of the substrate having the protective layer structure formed thereon.
 3. The semiconductor device of claim 1, wherein the protective layer structure includes a first oxide layer, a nitride layer, and a second oxide layer stacked on the second surface of the substrate, and wherein the TSV structure and the insulation layer structure protrude from the second surface of the substrate, and wherein the first oxide layer surrounds portions of sidewalls of the TSV structure and the insulation layer structure protruding from the second surface of the substrate.
 4. The semiconductor device of claim 1, wherein the insulation layer structure includes: a first insulation layer on the inner wall of the via hole; and a second insulation layer on the first insulation layer and the top surface of the insulating interlayer.
 5. The semiconductor device of claim 4, wherein the first and second insulation layers include substantially the same material.
 6. The semiconductor device of claim 4, wherein the first and second insulation layers have different thicknesses.
 7. The semiconductor device of claim 1, wherein the TSV structure includes: a barrier layer pattern on the insulation layer structure; and a conductive fill filling an inner space of the via hole formed by the barrier layer pattern.
 8. The semiconductor device of claim 1, wherein the conductive structure has a top surface coplanar with the top surface of the TSV structure.
 9. The semiconductor device of claim 1, wherein the protective layer structure includes a first oxide layer, a nitride layer, and a second oxide layer stacked on the second surface of the substrate.
 10. The semiconductor device of claim 1, wherein the protective layer structure includes a nitride layer and an oxide layer stacked on the second surface of the substrate.
 11. The semiconductor device of claim 1, wherein the contact pad is comprised of copper or nickel.
 12. The semiconductor device of claim 1, wherein the TSV structure includes: a center fill formed within the via hole; and a conductive fill that surrounds at least a portion of the center fill within the via hole, wherein the center fill has a thermal expansion coefficient that is lower than that of the conductive fill.
 13. A semiconductor device comprising: a circuit pattern formed over a first surface of a substrate; an insulating interlayer formed on the substrate to cover the circuit pattern; a through silicon via (TSV) structure filling a via hole formed through the insulating interlayer and the substrate; an insulation layer structure on an inner wall of the via hole and on a top surface of the insulating interlayer, wherein a top surface of the TSV structure is coplanar with a top surface of the insulation layer structure; a buffer layer on the TSV structure and the insulation layer structure; and a conductive structure formed through the insulation layer structure and at least a portion of the insulating interlayer to be electrically connected to the circuit pattern; a contact pad formed onto a bottom surface of the TSV structure; and a protective layer structure formed on a second surface of the substrate to surround the contact pad and at least a portion of the TSV structure protruding from the second surface of the substrate.
 14. The semiconductor device of claim 13, wherein the first surface of the substrate having the circuit pattern formed thereon is opposite the second surface of the substrate having the protective layer structure formed thereon.
 15. The semiconductor device of claim 13, wherein the contact pad is formed on the bottom surface of the TSV structure, the insulation layer structure, and the protective layer structure.
 16. The semiconductor device of claim 13, wherein the protective layer structure includes an oxide or a nitride.
 17. The semiconductor device of claim 13, wherein the TSV structure includes: a center fill formed within the via hole; and a conductive fill that surrounds at least a portion of the center fill within the via hole, wherein the center fill has a thermal expansion coefficient that is lower than that of the conductive fill.
 18. A stacked semiconductor device comprising: a first integrated circuit chip including: a first circuit pattern formed over a first surface of a first substrate; an insulating interlayer formed on the substrate to cover the first circuit pattern; a through silicon via (TSV) structure filling a via hole formed through the insulating interlayer and the first substrate; an insulation layer structure on an inner wall of the via hole and on a top surface of the insulating interlayer, wherein a top surface of the TSV structure is coplanar with a top surface of the insulation layer structure; a buffer layer on the TSV structure and the insulation layer structure; a conductive structure formed through the insulation layer structure and at least a portion of the insulating interlayer to be electrically connected to the first circuit pattern; a contact pad formed onto a bottom surface of the TSV structure; and a protective layer structure formed on a second surface of the first substrate to surround the contact pad; and a second integrated chip including: a second circuit pattern formed on a second substrate; a wiring electrically connected to the second circuit pattern; and a contact structure electrically connecting the contact pad of the first integrated chip to the wiring of the second integrated circuit chip.
 19. The stacked semiconductor device of claim 18, wherein the first surface of the first substrate having the first circuit pattern formed thereon is opposite the second surface of the first substrate having the protective layer structure formed thereon.
 20. The stacked semiconductor device of claim 18, wherein the first integrated circuit chip further includes another wiring electrically connected to the conductive structure.
 21. The stacked semiconductor device of claim 18, wherein the contact pad includes copper or nickel, and the contact structure includes solder.
 22. The stacked semiconductor device of claim 18, wherein the first integrated circuit chip further includes: a first pad electrode electrically connected to the wiring of the first integrated circuit chip; and a solder electrically connecting the first pad electrode to an external printed circuit board (PCB).
 23. The stacked semiconductor device of claim 18, wherein the second integrated circuit chip further includes a second pad electrode electrically connecting the wiring of the second integrated circuit chip to the contact structure.
 24. The stacked semiconductor device of claim 18, wherein the bottom surface of the TSV structure is coplanar with the second surface of the first substrate.
 25. The stacked semiconductor device of claim 18, wherein the protective layer structure includes a first oxide layer, a nitride layer, and a second oxide layer stacked on the second surface of the first substrate.
 26. The semiconductor device of claim 18, wherein the TSV structure includes: a center fill formed within the via hole; and a conductive fill that surrounds at least a portion of the center fill within the via hole, wherein the center fill has a thermal expansion coefficient that is lower than that of the conductive fill. 